Revision Notes: | ||
Revision Notes: |
| Document # 11005 | Rev. 2.0 |
| TITLE: | Facilities Equipment Procurement Requirements-Environmental, Health, and Safety (EHS) |
| REVISION CYCLE: | 36 Months |
| ISSUE DATE: | 10/8/2003 10:33:26 AM |
| EXPIRATION DATE: | 10/8/2006 10:33:26 AM |
| CONTENT OWNER: | Mike Yurconic |
| AUTHOR: | Mike Yurconic |
Section 11005
Facilities Equipment
Procurement Requirements - Environmental, Health, and Safety
(EHS)
|
Rev # |
Description of Change |
Author |
WP # |
Date | |
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11005 |
|||||
|
1.0 |
New spec created to formalize the process |
Yurconic |
1/29/02 | ||
|
1.1 |
Added FEPP checklists in appendices and removed links to these documents |
Swanson |
7/28/03 | ||
|
2.0 |
Published |
C. Bustos |
10/8/03 | ||
*********************************************************************************
Note to Specifier: The requirements and the evaluation process described below are intended to be applied to facility technologies and systems which are new to Intel and successive generations of existing systems if changes to design; 1) introduce hazards not previously evaluated, 2) potentially increase the consequences of analyzed failures or 3) effect the reliability of safety systems or the operability/maintainability of the equipment, 4) might impact the NRTL or CE Mark. Consult your EHS representative for questions or clarifications.
Add this section as a reference to all relevant equipment specifications
*********************************************************************************
1. General
1.1. Work Included
A. This section includes the environmental, health, and safety requirements that a supplier must meet for the procurement of facilities equipment.
1.2. Quality Control
A. When equipment is installed in the fabrication clean space, sheet plastic used in the construction of the equipment and components shall be Listed as “Non-Fire-Propagating” as defined in Table 1.
B. Equipment must have a European CE Declaration of Conformity if the system has the potential to be proliferated for use within the European Union.
C. All agreed supplier provided safety (EHS) upgrades that have taken place at any Intel site must be included in all subsequent Intel orders.
1.3. Shipping
A. Equipment should not be shipped to Intel that contains hazardous materials. If the equipment or a component of the equipment to be shipped to Intel has previously contained hazardous materials the equipment is to be fully decontaminated prior to shipment to Intel.
B. Equipment shall not be shipped to Intel unless the required submittals have been delivered and approved by Intel.
1.4. Submittals
A. Items outlined in Table 1 as a procurement requirements have the following submittal requirements:
1) Completion of the Intel EHS Facility Equipment RFI (Request For Information) Checklist (see Appendix A).
2) Completion of the Intel EHS Facility Equipment RFP (Request For Proposal) Checklist (see Appecndix A). This also includes:
a. Completion the of the Intel Facility Equipment Ergonomics Checklist (see Appendix B).
b. Submittal of applicable Material Safety Data Sheets.
c. Documentation of a Process Hazard Analysis (PHA) if previously performed by the supplier.
3) Documentation confirming that the equipment or its components are listed/labeled by a Nationally Recognized Testing Laboratory (NRTL), or a third party electrical inspection shall be provided prior to shipment.
4) Completion of Intel Code Compliance Checklist (see Appendix C) shall be completed prior to shipment
5) If equipment must have a European CE Declaration of Conformity, a letter of conformance must be submitted prior to shipment of the system to Intel
6) Completion of the Intel Combustible Materials Test Report (see Appendix D) prior to shipment to document that sheet plastic used in the construction of the equipment is Listed as “Non-Fire-Propagating.
B. If the equipment or a component of the equipment to be shipped to Intel has previously contained hazardous materials the equipment is to be fully decontaminated prior to shipment to Intel. For such equipment, the supplier is to provide to Intel documentation indicating the equipment was decontaminated including associated test results. This documentation should be included with the equipment shipment to Intel. The supplier will provide the following information at source inspection, in the equipment signoff package, and in a letter to the Intel, and attached to the outside of the equipment packaging:
“This tool has been in contact with the chemicals [insert appropriate names], has been fully decontaminated, and is in compliance with all applicable DOT codes. As good safety practice, when unpacking the tool, Personal Protective Equipment (PPE)consisting of [ insert appropriate PPE requirements] should be worn.” Define/spell out PPE”
2. Products - None
3. Execution
3.1. If a Process Hazard Analysis (PHA) is required per table 1, the supplier and AE are required to participate in an Intel facilitated forum. If the supplier has conducted a previous PHA, the results will be reviewed by Intel to determine the need for a subsequent PHA.
3.2. Should results of the Process Hazards Analysis (PHA) not be acceptable, the supplier and/or AE will make the appropriate modifications to the equipment or design prior to acceptance by Intel
3.3. If modifications are made to the equipment, at Intel’s option, the supplier will participate in a subsequent PHA
4. References
4.1. Intel Corporate Environmental, Health, and Safety Guideline - New Facilities Equipment Procurement Process
TABLE 1
EHS Facilities Equipment Procurement Requirements
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Instructions to spec editor: Fill in system name and details as well as EHS requirements, below. Add additional columns or pages, if required.
**********
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SYSTEM |
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COMPONENT |
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TAG NUMBER |
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SPEC REFERENCE NUMBER |
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INDICATOR (Minimum Committed Performance) |
Requirement (Yes/No) |
Requirement (Yes/No) |
Requirement (Yes/No) |
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SAFETY/ERGONOMICS |
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Completion of the Intel EHS Facility Equipment RFI Checklist |
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Completion of the Intel EHS Facility Equipment RFP Checklist |
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Completion and compliance with the acceptance criteria of the of the Intel Facility Equipment Ergonomics Checklist |
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Performance of a Process Hazard Analysis |
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Completion of the Intel Code Assessment Checklist |
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ELECTRICAL COMPLIANCE |
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Listed or labelled by a Nationally Recognized Testing Laboratory (NRTL), or have a third party electrical inspection acceptable by the local AHJ. - NEC (NFPA 70) Compliance - NFPA 79 Compliance |
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RISK MANAGEMENT |
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Sheet plastic used in the construction of the equipment is Listed as “Non-Fire-Propagating” 1. The only acceptable test methods are the following: - FMRC 4910 - UL2360 Class 1 or 2 |
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EU/ELECTROMAGNETIC2 |
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CE Marking Compliance |
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- 89/392/EEC Machinery Directive |
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Pressure Equipment Directive 97/23/EC |
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- 89/336/EEC Electromagnetic Compatibility Directive |
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- 72/23/EEC Low Voltage Directive |
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1This does not apply to plumbing or small molded parts such knobs, buttons, filters, scrubber media
2 This requirement is only applicable to systems with the potential to be proliferated for use within the European Union.
Appendix A: RFI/RFP Checklists
Request For Information: Facility Equipment Supplier EHS Checklist (RFI)
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Facility Equipment: |
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Supplier: |
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Date: |
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Item |
Indicator |
Yes |
No |
N/A |
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1. |
Does the system, as a requirement for its operation, have any chemicals integral to the unit? If yes, attach list. |
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2. |
If "yes" to Item 1: |
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a. Does the system contain any chemical which is regulated by 29 CFR 1910.119," Process Safety Management of Highly Hazardous Chemicals" or The EPA Clean Air Act Amendment Section 112(r)? |
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b. If "yes" to 2b, does the quantity meet or exceed the Threshold Quantity per the Standards? ** |
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c. Is/are the chemical(s) a suspect or known human carcinogen? ** |
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d. Is/are the chemical(s) a chlorofluorocarbon or an ozone depleting chemical (ODS)? ** |
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e. Is/are the chemical(s) an ethylene based glycol ether? ** |
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f. Does/do any chemical(s) required for system calibrations or maintenance and mandated by the supplier, meet any of the above criteria in Items 2a - 2f? |
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** If any one of these questions is a “yes,” the equipment/system will not be permitted for use at Intel.
Request For Proposal: Facility Equipment Supplier EHS Checklist (RFP)
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Facility Equipment: |
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Supplier: |
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Date: |
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Item |
Indicator |
Yes |
No |
N/A |
|
1. |
Does the system, as a requirement for its operation, have any chemicals integral to the unit? If yes, attach list. |
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2. |
If "yes" to Item 1: Provide MSDSs to Intel. |
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3. |
Have all electrical, thermal, mechanical hazards been identified? Are hazard warnings/guarding in place? Provide a list of these hazards, locations, control measures (if applicable) and warning statement. |
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4. |
Has a Nationally Recognized Testing Laboratory (NRTL) or Third Party electrical inspection been performed? If "yes" provide documentation. |
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5. |
Is the equipment labeled with the "CE" Mark? Key EU directives that the equipment must meet as a minimum are: Machinery, EMC, Low Voltage. (Note: This requirement is only applicable to systems intended for use within the European Union.) |
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6. |
Has the Intel "Facility Equipment Design Ergonomics Checklist" been completed? |
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7. |
Has a formal Hazards Analysis (e.g. PHA) been performed on the system? If "yes" provide documentation. (Note: It is not an Intel requirement that the supplier perform this analysis. However, if one exists it should be supplied to Intel.) ** |
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** The PHA must be performed prior to purchase and the supplier is expected to participate on the team.
Appendix B: Facilty Equipment Ergonomics Checklist
FACILITY EQUIPMENT DESIGN: ERGONOMICS CHECKLIST
Applicable to equipment operations, maintenance, service or access
|
Section |
Indicator |
Acceptance Criteria USCS units (Metric units) |
Actual |
|
1.0 |
Manual Material Handling |
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1.1 |
Material handling tasks performed on a routine or scheduled basis for operations or maintenance/service tasks are analyzed using appropriate procedures. |
Analysis and resulting documentation · NIOSH Lifting Equation · Biomechanical Analysis · Psychophysical Data Tables |
|
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2.0 |
Maintainability/Service |
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2.1 |
Integral lighting in routine maintenance areas is adequate for task. |
· 20-50 foot candles for rough assembly or ordinary inspection · 50-100 foot candles for medium assembly or difficult inspection · 100-500 foot candles for fine assembly or very difficult inspection |
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2.2 |
Routinely accessed points, adjustments, cables, and connectors should be accessible without extended reaches or awkward body postures. |
Easily accessible: · Vertically placed between 32” - 67” · Reach distance within 18” |
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2.3 |
Sliding or hinged equipment to which access is required, is free to open and rotate its full distance. |
· Hinged covers open a min. of 165° · Sliding covers fully open |
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2.4 |
Predicted or high failure-rate items should be accessible for replacement without removing non-failed items. |
Predicted or high failure-rate items independently accessible |
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2.5 |
Serviceable components should not be stacked directly on one another. |
Serviceable components independently accessible |
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2.6 |
Cables, connectors, plugs, receptacles, and receptacles should be labeled, keyed, color coded or otherwise configured to make connection easier and prevent cross connection. |
Identification present and keyed where needed |
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2.7 |
Circuit boards mounted in a card cage configuration must have gripping aids for mounting and removal. |
Gripping aids available |
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2.8 |
Covers must be self supporting , unless fully removable, in the open position. Exceptions may be self closing doors for fire safety or containment reasons. |
Covers self supporting or removable. |
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2.9 |
Accessible openings must be provided for frequently maintained items. |
Access provided and easy to open. No physical or visual obstructions exist. |
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2.10 |
Access covers should be equipped with handles or other means for opening them. |
Handles or alternative present and accommodate a large person’s hand. |
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2.11 |
Equipment should be designed for servicing by people wearing appropriate garments and required Personal Protective Equipment (PPE). Note: the use of gloves reduces grip strength |
Equipment design accommodates the use of required PPE and other appropriate garments. |
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2.12 |
Components requiring frequent removal/installation should include guide/locating aids to assist in positioning. |
Guide/locating pins present |
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2.13 |
Sharp edges or corners that present a personnel safety hazard or potential damage to clothing or equipment should be suitably protected or rounded. |
No sharp edges |
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3.0 |
Clearances |
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3.1 |
Manufacturer recommended clearances for operation and maintenance are define and documented.. |
Refer to enclosed guidelines in Table 1. |
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3.2 |
Clearance dimensions for maintenance/service operations enable a large male to gain access to perform the task with necessary PPE (Personal Protective Equipment) and tools. |
Refer to enclosed guidelines in Table 1. |
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4.0 |
Display Location (standing station) |
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4.1 |
Height of a single computer monitor. Measured from floor to center of screen. |
Maximum 58.0” (147.3cm) Minimum 52.0” (132.1cm) |
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4.2 |
Height of top computer monitor when monitors are vertically stacked.. Measured from floor to top line of the top monitor. |
Maximum 66.0” (167.6cm) The primary monitor should be the bottom monitor |
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4.3 |
Height of touch screen monitor. Measured from floor to top of the screen. |
Maximum 54in (137.2cm) If < 48” tilted upward 30 degrees If < 41” tilted upward 45 degrees |
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5.0 |
Display location (seated station) |
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5.1 |
Height of a single computer monitor. Measured made from floor to centerline of monitor. |
Maximum 47” (119.4cm) Minimum 37” (94cm) |
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5.2 |
Height of top computer monitor when monitors are vertically stacked. Measured from floor to top line of monitor. |
Maximum 55” (140cm) The primary monitor should be the bottom monitor |
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5.3 |
Height of touch screen monitor. Measured from floor to center of screen. |
Maximum 42” (106.7cm) If < 42” tilted upward 30 degrees |
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6.0 |
Hand Control Location (standing station) |
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6.1 |
Vertical location of low use and/or critical controls (e.g. EMO’s) measured from a standing surface. |
Maximum 64.5” (163.8cm) Minimum 33” (83.8cm) |
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6.2 |
Vertical location of high use controls measurement from standing surface. |
Maximum 50” (127cm) Minimum 37” (94cm) |
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6.3 |
Horizontal reach to low use controls measured from shoulder. |
Maximum 24” (61cm) Minimum 9” (22.9cm) |
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6.4 |
Horizontal reach to high use controls measured from shoulder. |
Maximum 19” (48.3cm) Minimum 9” (22.9cm) |
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7.0 |
Hand Control Location (seated station) |
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7.1 |
Vertical location of low use controls measured from floor. |
Maximum 55” (140cm) Minimum 21” (53.3cm) |
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7.2 |
Vertical location of infrequently used but critical controls (e.g. EMO location) measured from floor. |
Maximum 39” (99cm) Minimum 21” (53.3cm) |
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7.3 |
Vertical location of high use controls measured from floor. |
Maximum 42” (106.7cm) Minimum 30” (76.2cm) |
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7.4 |
Horizontal reach to low use controls measured from shoulder. |
Maximum 24” (61cm) Minimum 9” (22.9cm) |
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7.5 |
Horizontal reach to high use controls measured from shoulder. |
Maximum 19” (48.3cm) Minimum 9” (22.9cm) |
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Table 1. Clearance Guidelines**
|
Criteria |
Minimum Shoulder Width in.(cm) |
Minimum Height in.(cm) |
Minimum Length in.(cm) |
Minimum Working Heighta in.(cm) |
Overhead Clearance in.(cm) |
Forward Horizontal Clearance in.(cm) |
|
Width |
24.0 (61.0) |
----- |
----- |
----- |
----- |
----- |
|
Supine (lying on back) |
----- |
17.0 (43.8) |
78.0 (198.1) |
----- |
----- |
----- |
|
Prone or Crawl Space |
----- |
20.0 (50.8) |
96.0 (243.8) |
----- |
----- |
----- |
|
Standing |
----- |
----- |
----- |
36.0 (91.4) |
78.0 (198.1) |
27.0 (68.6) |
|
Sitting on Floor |
----- |
----- |
----- |
11.0 (27.9) |
39.5 (100.3) |
27.0 (68.6) |
|
Squatting |
----- |
----- |
----- |
18.0 (45.7) |
48.0 (121.9) |
31.0 (78.7) |
|
Kneeling |
----- |
----- |
----- |
25.0 (63.5) |
57.0 (144.8) |
48.0 (121.9) |
|
Kneeling Crawl |
----- |
----- |
----- |
----- |
29.0 (73.6) |
60.0 (152.4) |
|
Stooping |
----- |
----- |
----- |
25.0 (63.5) |
57.0 (144.8) |
40.0 (101.6) |
Data adapted from Humanscale 9A, 1981
** These clearance guidelines apply to maintenance on the equipment/system.
Appedix C: Facility Systems Code Assessment Checklist
FACILITY EQUIPMENT
CODE ASSESSMENT CHECKLIST
|
OSHA/General |
Yes |
No |
N/A |
Comments |
|
Covers and/or guardrails are provided to protect personnel from the hazards of open tanks, vats etc.? |
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Every runway is guarded by a standard railing on all open sides 4 feet or more above floor or ground level? In California, 30 inches above floor, ground or other working areas? |
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Railings consist of a top rail, intermediate rail and posts and have a vertical height of 42 inches from upper surface of top rail to floor? |
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Railings are capable of withstanding a load of at least 200 pounds applied in any direction at any point on the top rail? Railings have a maximum allowable deflection of ½ inch ? |
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The system’s equipment uses fail-safe hardware and software interlocks to protect against hazards inherent in the operation of the equipment? |
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Are appropriate chemical, physical and thermal hazard warnings on the system? |
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Are physical barriers in place to protect against thermal and mechanical hazards? |
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Are mechanical hazards adequately guarded or enclosed? Does guarding of mechanical power transmission equipment meet the requirements of ANSI B15.1 covering Mechanical Power-Transmission Apparatus? |
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Is the system/equipment designed to operate at the lowest practical dBA level? Does it operate at £ 80 dBA |
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Can potential confined spaces be eliminated? |
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Have all potential confined spaces been identified and labeled? Do confined spaces have a means of isolating hazards within those spaces? |
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Can the system’s equipment electrical access doors/panels open to at least 90 degrees? |
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Chemicals associated with operating the system are compatible with the materials of construction? |
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Energy isolation is provided which ensures compliance with 29 CFR 1910.147 and 29 CFR 1910.331-335? |
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Are all unfired pressure vessels designed and constructed to meet the ASME Boiler and Pressure Vessel Code? Certification is supplied and the vessel is labeled? |
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Are relief devices on pressure vessels set to the safe working pressure of the vessel or to the lowest safe working pressure of the system, whichever is lower? Are relief devices labeled to indicate the set point? |
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Does the equipment/system have an “emergency off” (EMO) circuit which, when activated places the equipment/system in a safe shutdown condition? |
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|
Are all EMOs clearly labeled and easily accessible? |
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|
UFC/UBC/UMC |
Yes |
No |
N/A |
Comments |
|
The system and its sub-assemblies have protection from movement during earthquakes? |
||||
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The use of combustible and smoke generating materials in the construction of the equipment is limited? Provide approximate percentage of combustible materials (expressed as % surface area). |
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Does combustible material used in construction have a flame spread criteria of not more than 25 and a smoke-developing rating of not more than 50? |
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Are all portions of the system which contain flammable/combustible liquids constructed from noncombustible materials? |
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If the system/equipment uses flammable, combustible or hazardous liquids, is secondary containment designed into the system? |
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Are all mechanical fittings where hazardous liquids may be present within the secondary containment? |
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In systems which contain hazardous materials and which may be located in outdoor locations or in a facility where they may be subject to physical damage from vehicles, have bollards or other means for protection been provided in the design? |
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Where hazardous gases or liquids are carried in pressurized piping above 15 psig has excess flow control been provided? |
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|
Has the PHA team comprehended: a. The exempt amounts in the applicable UFC Article ( 51, 79, 80) will not be exceeded in the design? b. Whether fire separation(s) may be necessary from existing facility? c. Whether fire detection/suppression is necessary? |
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Does the system/portions of the system require that the immediate location be designed with electrical rated for hazardous/wet locations? |
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Does the system include equipment having a maximum ozone-generating capacity of ½ pound (0.23 kg) or more over a 24 hour period? Does this equipment meet the design requirements of UFC Appendix II-I and Intel’s Design Guideline for Ozone Generating Devices? |
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Appendix D: Tool Combustible Materials Test Report
Tool Construction: Combustible Materials Test Report
|
Supplier: |
Model No.: |
||
It is Intel’s policy, under agreement with local code authority, that equipment, constructed with combustible sheet plastic limit the quantity of sheet plastic. Sheet plastics Listed as “Non-fire-propagating” (FMRC 4910 and UL 2360 Class 1 or 2) are acceptable alternatives. (The UL 94 test methods are not acceptable for rating the flammability of sheet plastics used in the construction of equipment located in clean rooms.) The minimum requirement is provided below. If you have any questions regarding applicable materials, acceptable listings or other concerns, please contact your EHS representatives.
Total weight of combustible plastic [kg or lbs]*: _______ (Total from Table A)
Total footprint (area) of the tool [sq.m. or sq.ft.]: _______
Metric (Weight/Area): _______
(Minimum Requirement < 1 lb./sq.ft. or 5 kg/sq.m.)
*Plastics meeting the FMRC 4910 or UL 2360 Class 1 or 2 Fire Test Protocols (i.e. sheet plastic Listed as non-fire-propagating) need not be included it the total weight of combustible plastics. The UL 94 test method materials must be included in the weight of combustible plastics listed in Table A.
Please use Table A for tabulating any sheet plastics that do not have FMRC 4910 or UL 2360 (Class 1 or 2) Listings. Small molded parts, plumbing and wiring insulation are not considered:
|
i. TABLE A |
Material #1 |
Material #2 |
Material #3 |
Material #4 |
|
Material |
||||
|
Weight – Total (lbs. or Kg.) |
||||
|
Applicable Test Data or other Relevant Flammability Data: May include UL-94V, ASTM E84, etc.) |
||||
Total Weight of Materials in Table A: _________________
Please use Table B for tabulating any noncombustible sheet (optional) or sheet plastics that have FMRC 4910 or UL 2360 (Class 1 or 2) Listings. Also tabulate PVDF, PTFE, PFA, and PEEK materials on this table regardless of Listings.
|
ii. TABLE B |
Material #1 |
Material #2 |
Material #3 |
Material #4 |
|
Material |
||||
|
Weight – Total (lbs. or Kg.) |
||||
|
Applicable Listing: FMRC 4910 or UL 2360 (Class 1 or 2). Noncombustible: N/C PEEK, PFA, PTFE and PVDF: N/A |
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End Of Section
Revision Notes: | ||
Revision Notes: |